Samsung Display / Wonik Holdings

Nitrous Oxide(N2O) Storage and Supply Process for Semiconductor plant



Basic, Detail Process engineering and Commissioning Supervising

Nitrous Oxide is widely used for CVD of SiO2 at semiconductor field.

High purified Liquid N2O is introduced from N2O Tank lorry and it is transferred to N2O Storage tank via N2O Pump.

N2O liquid in Storage tank is remained as liquid and the pressure is maintained, which is measured by cooling through refrigerator.

This stored liquid N2O is vaporized and supplied to Semiconductor plant such as Display Manufacturing or Memory chip manufacturing plant.